Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Laser interferometers and grating based on optical interferometry are widely used in displacement measurement of precision machining testing equipment, such as the system integrated circuit due to their high precision, noncontact, large dynamic range. The ghost reflection elements may lead periodic nonlinear error interferometer also reduce alternating current/direct current. We propose a general method for automatic interface identification. It can analyze influence weight each any interferometer. In addition, manufacturing cost is effectively reduced by optimization algorithms that enable avoidance design. Experimental results prove at different positions provide parameter selection most suitable